Mølhave Kristian, Hansen Torben Mikael, Madsen Dorte Nørgaard, Bøggild Peter
Department of Micro and Nanotechnology, Technical University of Denmark, DK-2800 Lyngby, Denmark.
J Nanosci Nanotechnol. 2004 Mar;4(3):279-82. doi: 10.1166/jnn.2004.025.
We examine an approach to three-dimensional pick-and-place assembly of wire-like nanoscale components, such as carbon nanotubes and silicon nanowires, on microstructures inside a scanning electron microscope. In this article we demonstrate that microfabricated electrostatically acutuated tweezers can pick up silicon nanowires and show how electron beam deposition of carbon residues can be used to assemble carbon nanotubes on microelectrodes.
我们研究了一种在扫描电子显微镜内的微结构上对诸如碳纳米管和硅纳米线等线状纳米级组件进行三维拾取和放置组装的方法。在本文中,我们展示了微加工的静电驱动镊子可以拾取硅纳米线,并展示了如何利用碳残留物的电子束沉积将碳纳米管组装在微电极上。