带有硅/空气布拉格反射镜的集成波导法布里-珀罗微腔。

Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors.

作者信息

Pruessner Marcel W, Stievater Todd H, Rabinovich William S

机构信息

Photonics Technology Branch, Naval Research Laboratory, 4555 Overlook Avenue SW, Washington, DC 20375, USA.

出版信息

Opt Lett. 2007 Mar 1;32(5):533-5. doi: 10.1364/ol.32.000533.

DOI:10.1364/ol.32.000533

PMID:17392912

Abstract

We demonstrate in-plane microfabricated Fabry-Perot cavities with cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors and integrated silicon-on-insulator rib waveguides. Several DBR configurations and cavity lengths were measured. Various devices exhibit Q=26963, FWHM=0.060 nm, finesse F=489, free spectral range FSR=81.7 nm, and DBR mirror reflectance R=99.4%. Thermo-optic tuning over 6.7 nm is also demonstrated.

摘要

我们展示了采用低温蚀刻硅/空气分布布拉格反射镜（DBR）和集成绝缘体上硅肋波导的面内微加工法布里-珀罗腔。测量了几种DBR配置和腔长。各种器件表现出Q = 26963、半高宽FWHM = 0.060 nm、精细度F = 489、自由光谱范围FSR = 81.7 nm以及DBR镜反射率R = 99.4%。还展示了6.7 nm的热光调谐。