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CASINO V2.42:一款面向扫描电子显微镜和微分析用户的快速且易于使用的建模工具。

CASINO V2.42: a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users.

作者信息

Drouin Dominique, Couture Alexandre Réal, Joly Dany, Tastet Xavier, Aimez Vincent, Gauvin Raynald

机构信息

Electrical Engineering Department, Universite de Sherbrooke, Sherbrooke, Québec, Canada.

出版信息

Scanning. 2007 May-Jun;29(3):92-101. doi: 10.1002/sca.20000.

Abstract

Monte Carlo simulations have been widely used by microscopists for the last few decades. In the beginning it was a tedious and slow process, requiring a high level of computer skills from users and long computational times. Recent progress in the microelectronics industry now provides researchers with affordable desktop computers with clock rates greater than 3 GHz. With this type of computing power routinely available, Monte Carlo simulation is no longer an exclusive or long (overnight) process. The aim of this paper is to present a new user-friendly simulation program based on the earlier CASINO Monte Carlo program. The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography. This version uses a new architecture that provides results twice as quickly. This program is freely available to the scientific community and can be downloaded from the website: (www.gel.usherb.ca/casino).

摘要

在过去几十年里,蒙特卡罗模拟已被显微镜学家广泛使用。一开始,这是一个繁琐且缓慢的过程,需要用户具备高水平的计算机技能,且计算时间很长。微电子行业的最新进展现在为研究人员提供了价格实惠、时钟频率大于3 GHz的台式计算机。有了这种常规可用的计算能力,蒙特卡罗模拟不再是一个专属的或耗时长久(通宵)的过程。本文的目的是基于早期的CASINO蒙特卡罗程序,展示一个新的用户友好型模拟程序。该软件的目的是帮助扫描电子显微镜用户解释成像和微分析,以及进行包括电子束光刻在内的更先进的程序。这个版本采用了一种新架构,能将结果的生成速度提高一倍。该程序可供科学界免费使用,可从网站(www.gel.usherb.ca/casino)下载。

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