用于静电力显微镜的、具有可控角度、长度和半径的、附着于原子力显微镜悬臂的高纵横比金属尖端。

High-aspect ratio metal tips attached to atomic force microscopy cantilevers with controlled angle, length, and radius for electrostatic force microscopy.

作者信息

Cockins Lynda, Miyahara Yoichi, Stomp Romain, Grutter Peter

机构信息

Department of Physics, McGill University, 3600 Rue University, H3A 2T8 Montreal, Canada.

出版信息

Rev Sci Instrum. 2007 Nov;78(11):113706. doi: 10.1063/1.2805513.

DOI:10.1063/1.2805513

PMID:18052479

Abstract

We demonstrate a method to fabricate a high-aspect ratio metal tip attached to microfabricated cantilevers with controlled angle, length, and radius, for use in electrostatic force microscopy. A metal wire, after gluing it into a guiding slot that is cut into the cantilever, is shaped into a long, thin tip using a focused ion beam. The high-aspect ratio results in considerable reduction of the capacitive force between tip body and sample when compared to a metal coated pyramidal tip.

摘要

我们展示了一种制造高纵横比金属尖端的方法，该尖端附着在具有可控角度、长度和半径的微加工悬臂上，用于静电力显微镜。将一根金属丝粘入悬臂上切割出的导向槽后，使用聚焦离子束将其加工成细长的尖端。与金属涂层金字塔形尖端相比，高纵横比可显著降低尖端主体与样品之间的电容力。