通过考虑莫尔条纹轮廓中谐波的影响提高阴影莫尔条纹测量精度。
Improvement of measurement accuracy in shadow moiré by considering the influence of harmonics in the moiré profile.
作者信息
Arai Y, Yokozeki S
机构信息
Department of Mechanical Engineering, Faculty of Engineering, Kansai University, 3-3-35, Yamatecho, Suita 564-8680, Osaka, Japan.
出版信息
Appl Opt. 1999 Jun 1;38(16):3503-7. doi: 10.1364/ao.38.003503.
A method for high-resolution three-dimensional shape measurement for a shadow moiré system is proposed. To increase the resolving power of the method, the problem caused by the harmonics of the moiré profile needs to be solved. It is well known that moiré fringes in a shadow moiré system have a nonsinusoidal profile caused by harmonics. The influence of the harmonics in moiré profile on the measurement accuracy of the method is discussed. The method is improved to eliminate the error caused by the harmonics in the moiré profile. Both simulation and experimental results show that the improved method can effectively reduce the influence of harmonics.
提出了一种用于阴影莫尔系统的高分辨率三维形状测量方法。为了提高该方法的分辨率，需要解决由莫尔条纹轮廓的谐波引起的问题。众所周知，阴影莫尔系统中的莫尔条纹具有由谐波引起的非正弦轮廓。讨论了莫尔条纹轮廓中的谐波对该方法测量精度的影响。对该方法进行了改进，以消除由莫尔条纹轮廓中的谐波引起的误差。仿真和实验结果均表明，改进后的方法能够有效降低谐波的影响。
Zotero 插件