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通过一步全息光刻法制备具有功能缺陷的光子晶体。

Fabrication of photonic crystals with functional defects by one-step holographic lithography.

作者信息

Li Juntao, Liu Yikun, Xie Xiangsheng, Zhang Peiqing, Liang Bing, Yan Li, Zhou Jianying, Kurizki Gershon, Jacobs Daniel, Wong Kam Sing, Zhong Yongchun

机构信息

State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University, Guangzhou 510275, China.

出版信息

Opt Express. 2008 Aug 18;16(17):12899-904. doi: 10.1364/oe.16.012899.

Abstract

A one-step introduction of functional defects into a photonic crystal is demonstrated. By using a multi-beam phase-controlled holographic lithography, line-defects in a Bragg structure and embedded waveguides in a two-dimensional photonic crystal are fabricated. Intrinsic defect introduction into a 3-dimensional photonic crystal is also proposed. This technique gives rise to a substantial reduction of the fabrication complexity and a significant improvement on the accuracy of the functional defects in photonic crystals.

摘要

展示了一种将功能缺陷一步引入光子晶体的方法。通过使用多光束相位控制全息光刻技术,制备了布拉格结构中的线缺陷和二维光子晶体中的嵌入式波导。还提出了将本征缺陷引入三维光子晶体的方法。该技术大大降低了制造复杂性,并显著提高了光子晶体中功能缺陷的精度。

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