Compeau R, Gilmore M, Watts C
University of New Mexico, 1 University of New Mexico, Albuquerque, New Mexico 87131, USA.
Rev Sci Instrum. 2008 Oct;79(10):10F128. doi: 10.1063/1.2971208.
Triple probes have been used to measure plasma parameters of low temperature and edge plasmas, yielding simultaneous measurements of electron temperature, ion density, and floating potential. Unlike standard Langmuir and double probe techniques, there is no requirement to sweep the probe potential relative to the plasma, thus allowing fast time resolution. However, in some plasma systems "ground" is not well defined with respect to a known ground, may vary strongly in time, or may be at an inconveniently high voltage. The resulting high plasma (or floating) potential requires common mode rejection before the signals can be digitized. A signal detection circuit constructed from inexpensive operational amplifiers and that makes use of a novel floating bias generation configuration is described.
三探针已被用于测量低温和边缘等离子体的等离子体参数,可同时测量电子温度、离子密度和浮动电位。与标准的朗缪尔探针和双探针技术不同,不需要相对于等离子体扫描探针电位,因此具有快速的时间分辨率。然而,在一些等离子体系统中,“地”相对于已知的地定义不明确,可能随时间剧烈变化,或者可能处于不方便的高电压。在信号数字化之前,由此产生的高等离子体(或浮动)电位需要共模抑制。本文描述了一种由廉价运算放大器构建的信号检测电路,该电路采用了一种新颖的浮动偏置产生配置。