用于离子束蚀刻监测和多层结构终点检测的光腔衰荡光谱传感器。

Cavity ring-down spectroscopy sensor for ion beam etch monitoring and end-point detection of multilayer structures.

作者信息

Tao L, Yalin A P, Yamamoto N

机构信息

Department of Mechanical Engineering, Colorado State University, Fort Collins, Colorado 80523, USA.

出版信息

Rev Sci Instrum. 2008 Nov;79(11):115107. doi: 10.1063/1.2995765.

DOI:10.1063/1.2995765

PMID:19045913

Abstract

This contribution reports on the development of in situ sputter monitoring and end-point detection for ion beam etch systems using continuous-wave cavity ring-down spectroscopy (cw-CRDS). The demonstrated system is based on the detection of sputtered manganese atoms using a tunable external cavity diode laser in the vicinity of 403.07 nm. The cw-CRDS system is described and measurements from a manganese-iron target are presented. End-point detection is demonstrated by monitoring the time dependence of manganese concentration for a multilayer target comprised of alternating layers of manganese/iron and titanium. Detection limits are shown to be adequate for today's commercial ion beam sputter systems.

摘要

本论文报道了利用连续波腔衰荡光谱技术（cw-CRDS）开发用于离子束蚀刻系统的原位溅射监测和终点检测方法。所展示的系统基于使用可调谐外腔二极管激光器在403.07nm附近检测溅射的锰原子。描述了cw-CRDS系统，并给出了来自锰铁靶材的测量结果。通过监测由锰/铁和钛的交替层组成的多层靶材中锰浓度随时间的变化，展示了终点检测。结果表明，检测限对于当今的商用离子束溅射系统来说是足够的。