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通过金微丝掩膜法制备的单个二氧化锡纳米线晶体管。

Individual SnO2 nanowire transistors fabricated by the gold microwire mask method.

作者信息

Sun Jia, Tang Qingxin, Lu Aixia, Jiang Xuejiao, Wan Qing

机构信息

Key Laboratory for Micro-Nano Optoelectronic Devices of Ministry of Education, Hunan University, Changsha, People's Republic of China.

出版信息

Nanotechnology. 2009 Jun 24;20(25):255202. doi: 10.1088/0957-4484/20/25/255202. Epub 2009 Jun 2.

Abstract

A gold microwire mask method is developed for the fabrication of transistors based on single lightly Sb-doped SnO(2) nanowires. Damage of the nanowire's surface can be avoided without any thermal annealing and surface modification, which is very convenient for the fundamental electrical and photoelectric characterization of one-dimensional inorganic nanomaterials. Transport measurements of the individual SnO(2) nanowire devices demonstrate the high-performance n-type field effect transistor characteristics without significant hysteresis in the transfer curves. The current on/off ratio and the subthreshold swing of the nanowire transistors are found to be 10(6) and 240 mV/decade, respectively.

摘要

一种用于基于单根轻度锑掺杂的SnO₂纳米线制造晶体管的金微丝掩膜方法被开发出来。无需任何热退火和表面改性即可避免纳米线表面的损伤,这对于一维无机纳米材料的基础电学和光电特性表征非常方便。对单个SnO₂纳米线器件的输运测量表明其具有高性能n型场效应晶体管特性,转移曲线中无明显滞后现象。发现纳米线晶体管的电流开/关比和亚阈值摆幅分别为10⁶和240 mV/十倍频程。

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