Department of Chemistry and Biochemistry, University of California, Los Angeles, CA 90095, USA.
Nanotechnology. 2010 Jan 8;21(1):015705. doi: 10.1088/0957-4484/21/1/015705. Epub 2009 Nov 30.
The fact that single-layer graphene can be visualized on 300 nm SiO(2)/Si substrate using an optical microscope has enabled the facile fabrication of single-layer graphene devices for fundamental studies and potential applications. Here we report on an Al(2)O(3)/Si substrate for the fabrication of graphene devices with better contrast and higher performance. Our studies show that the contrast of single-layer graphene on 72 nm Al(2)O(3)/Si substrate is much better than that of single-layer graphene on 300 nm SiO(2)/Si substrate. Moreover, the transconductance of single-layer graphene transistors on Al(2)O(3)/Si substrate shows a more than sevenfold increase, due to the smaller dielectric thickness and higher dielectric constant in a 72 nm Al(2)O(3) film. These studies demonstrate a new and superior substrate for the fabrication of graphene transistors, and are of significance for both fundamental studies and technological applications.
单层石墨烯可以用光学显微镜在 300nmSiO2/Si 衬底上可视化,这一事实使得易于制造用于基础研究和潜在应用的单层石墨烯器件。在此,我们报告了一种 Al2O3/Si 衬底,用于制造具有更好对比度和更高性能的石墨烯器件。我们的研究表明,72nmAl2O3/Si 衬底上单层石墨烯的对比度明显优于 300nmSiO2/Si 衬底上单层石墨烯的对比度。此外,由于 72nmAl2O3 薄膜的介电厚度更小、介电常数更高,Al2O3/Si 衬底上单层石墨烯晶体管的跨导增加了 7 倍以上。这些研究为石墨烯晶体管的制造提供了一种新的、优越的衬底,对基础研究和技术应用都具有重要意义。