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在 Al2O3/Si 衬底上的单层石墨烯:石墨烯晶体管具有更好的对比度和更高的性能。

Single-layer graphene on Al2O3/Si substrate: better contrast and higher performance of graphene transistors.

机构信息

Department of Chemistry and Biochemistry, University of California, Los Angeles, CA 90095, USA.

出版信息

Nanotechnology. 2010 Jan 8;21(1):015705. doi: 10.1088/0957-4484/21/1/015705. Epub 2009 Nov 30.

Abstract

The fact that single-layer graphene can be visualized on 300 nm SiO(2)/Si substrate using an optical microscope has enabled the facile fabrication of single-layer graphene devices for fundamental studies and potential applications. Here we report on an Al(2)O(3)/Si substrate for the fabrication of graphene devices with better contrast and higher performance. Our studies show that the contrast of single-layer graphene on 72 nm Al(2)O(3)/Si substrate is much better than that of single-layer graphene on 300 nm SiO(2)/Si substrate. Moreover, the transconductance of single-layer graphene transistors on Al(2)O(3)/Si substrate shows a more than sevenfold increase, due to the smaller dielectric thickness and higher dielectric constant in a 72 nm Al(2)O(3) film. These studies demonstrate a new and superior substrate for the fabrication of graphene transistors, and are of significance for both fundamental studies and technological applications.

摘要

单层石墨烯可以用光学显微镜在 300nmSiO2/Si 衬底上可视化,这一事实使得易于制造用于基础研究和潜在应用的单层石墨烯器件。在此,我们报告了一种 Al2O3/Si 衬底,用于制造具有更好对比度和更高性能的石墨烯器件。我们的研究表明,72nmAl2O3/Si 衬底上单层石墨烯的对比度明显优于 300nmSiO2/Si 衬底上单层石墨烯的对比度。此外,由于 72nmAl2O3 薄膜的介电厚度更小、介电常数更高,Al2O3/Si 衬底上单层石墨烯晶体管的跨导增加了 7 倍以上。这些研究为石墨烯晶体管的制造提供了一种新的、优越的衬底,对基础研究和技术应用都具有重要意义。

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本文引用的文献

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Graphene: status and prospects.石墨烯:现状与展望。
Science. 2009 Jun 19;324(5934):1530-4. doi: 10.1126/science.1158877.
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Carbon-based electronics.碳基电子学。
Nat Nanotechnol. 2007 Oct;2(10):605-15. doi: 10.1038/nnano.2007.300. Epub 2007 Sep 30.
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Energy band-gap engineering of graphene nanoribbons.石墨烯纳米带的能带隙工程
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