An ultralow noise preamplifier for low frequency noise measurements.

Low frequency noise measurements are among the most sensitive tools for the investigation of the quality and of the reliability of semiconductor devices. The sensitivity that can be obtained depends on the background noise of the low noise preamplifier coupled to the device under test (DUT) that, at very low frequencies, is dominated by flicker noise. The low frequency noise produced by the DUT, on the other end, is very often the most interesting signal to be detected and analyzed. In this work we propose a very simple topology for the realization of a general purpose low noise preamplifier whose noise performances, at very low frequencies (below 10 Hz), are significantly better than those that can be obtained by the most popular commercial instrumentation. Indeed, a gain of 80 dB with a pass band extending from a few tens of mHz up to a few kHz with an equivalent input voltage noise as low as 14 nV/square root(Hz) (100 mHz), 1.4 nV/square root(Hz) (1 Hz), 1.0 nV/square root(Hz) (10 Hz), and 0.8 nV/square root(Hz) (1 kHz) are consistently obtained by using quite standard electronic components and with no need for trimming and/or calibration steps. Moreover, the junction field-effect transistor input stage of the amplifier is characterized by an equivalent input current noise below 4 fA/square root(Hz) in the entire bandwidth, resulting in negligible background noise degradation for DUT impedances in excess of 100 kohms.