Zhu Jingtao, Zhou Sika, Li Haochuan, Huang Qiushi, Wang Zhanshan, Le Guen Karine, Hu Min-Hui, André Jean-Michel, Jonnard Philippe
Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092, China.
Appl Opt. 2010 Jul 10;49(20):3922-5. doi: 10.1364/AO.49.003922.
Mg-based multilayers, including SiC/Mg, Co/Mg, B(4)C/Mg, and Si/Mg, are investigated for solar imaging and a He II calibration lamp at a 30.4 nm wavelength. These multilayers were fabricated by a magnetron sputtering method and characterized by x-ray reflection. The reflectivities of these multilayers were measured by synchrotron radiation. Near-normal-incidence reflectivities of Co/Mg and SiC/Mg multilayer mirrors are as high as 40.3% and 44.6%, respectively, while those of B(4)C/Mg and Si/Mg mirrors are too low for application. The measured results suggest that SiC/Mg, Co/Mg multilayers are promising for a 30.4 nm wavelength.
研究了包括碳化硅/镁、钴/镁、碳化硼/镁和硅/镁在内的镁基多层膜用于太阳成像以及在30.4纳米波长下的氦II校准灯。这些多层膜通过磁控溅射法制备,并通过X射线反射进行表征。这些多层膜的反射率通过同步辐射测量。钴/镁和碳化硅/镁多层镜的近正入射反射率分别高达40.3%和44.6%,而碳化硼/镁和硅/镁镜的反射率太低,无法应用。测量结果表明,碳化硅/镁、钴/镁多层膜在30.4纳米波长下具有应用前景。