原子层沉积二氧化钛及其在共振波导光栅中的应用。

Atomic layer deposited titanium dioxide and its application in resonant waveguide grating.

作者信息

Alasaarela T, Saastamoinen T, Hiltunen J, Säynätjoki A, Tervonen A, Stenberg P, Kuittinen M, Honkanen S

机构信息

Department of Micro and Nanosciences, Aalto University School of Scienceand Technology, Micronova, PO Box 13500, FI-00076 Aalto, Finland.

出版信息

Appl Opt. 2010 Aug 1;49(22):4321-5. doi: 10.1364/AO.49.004321.

DOI:10.1364/AO.49.004321

PMID:20676189

Abstract

We demonstrate good optical quality TiO(2) thin films grown by atomic layer deposition at 120 degrees C. The optical properties were studied using spectroscopic ellipsometry and prism coupling methods. The refractive index was 2.27, and the slab waveguide propagation loss was less than 1dB/cm at 1.53microm. A high quality resonant waveguide grating was fabricated using a thin TiO(2) layer on top of a SiO(2) grating.

摘要

我们展示了通过在120摄氏度下原子层沉积生长的具有良好光学质量的二氧化钛（TiO₂）薄膜。使用光谱椭偏仪和棱镜耦合方法研究了其光学性质。折射率为2.27，在1.53微米处平板波导传播损耗小于1分贝/厘米。在二氧化硅（SiO₂）光栅顶部使用薄二氧化钛层制造了高质量的谐振波导光栅。