基于热纳米压印光刻技术的低损耗硫族化物玻璃波导

Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography.

作者信息

Han Ting, Madden Steve, Bulla Douglas, Luther-Davies Barry

机构信息

Centre for Ultrahigh Bandwidth Devices for Optical Systems, Laser Physics Centre, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 2600, Australia.

出版信息

Opt Express. 2010 Aug 30;18(18):19286-91. doi: 10.1364/OE.18.019286.

DOI:10.1364/OE.18.019286

PMID:20940824

Abstract

We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2-4 µm wide and 1 µm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550 nm.

摘要

我们报道了通过使用软印章进行热纳米压印，由硫系玻璃薄膜制备低损耗肋形波导。制备出了宽2 - 4 µm、高1 µm的波导，其侧壁极其光滑，在1550 nm波长下，横磁（TM）偏振的光损耗受瑞利散射限制为0.26 dB/cm，横电（TE）偏振的光损耗为0.27 dB/cm。