基于用于绝缘体上硅波导的氮化硅覆盖层的高效光栅耦合器设计。

Design of a high-efficiency grating coupler based on a silicon nitride overlay for silicon-on-insulator waveguides.

作者信息

Chen Huai-Yi, Yang Kai-Chun

机构信息

Department of Electronic Engineering, Huafan University, Taipei, 22301, Taiwan.

出版信息

Appl Opt. 2010 Nov 20;49(33):6455-62. doi: 10.1364/AO.49.006455.

DOI:10.1364/AO.49.006455

PMID:21102671

Abstract

A waveguide grating coupler based on a silicon nitride overlay at 1.55 μm for TE polarization is designed with no experimental demonstration. Its coupling efficiency for a fiber is 76%, the 1 dB bandwidth is 75 nm, and the coupling angle is 10°. The effects of different device parameters on the coupling performance for the grating coupler are discussed. The coupling efficiency of our grating coupler is almost equal, yet the 1 dB spectral bandwidth is around 25 nm broader, as compared with the grating coupler design based on a poly-silicon overlay. The coupling performance of our coupling device could still be further improved. The grating coupler presented in this paper is applicable to the optical coupling in nanophotonic integrated circuits.

摘要

设计了一种基于1.55μm氮化硅覆盖层的用于TE偏振的波导光栅耦合器，但未进行实验验证。其光纤耦合效率为76%，1dB带宽为75nm，耦合角为10°。讨论了不同器件参数对光栅耦合器耦合性能的影响。与基于多晶硅覆盖层的光栅耦合器设计相比，我们的光栅耦合器的耦合效率几乎相同，但1dB光谱带宽宽约25nm。我们耦合器件的耦合性能仍可进一步提高。本文提出的光栅耦合器适用于纳米光子集成电路中的光耦合。