Low-loss strip-loaded slot waveguides in silicon-on-insulator.

Electro-optic polymer-clad silicon slot waveguides have recently been used to build a new class of modulators, that exhibit very high bandwidths and extremely low drive voltages. A key step towards making these devices practical will be lowering optical insertion losses. We report on the first measurements of low-loss waveguides that are geometrically suitable for high bandwidth slot waveguide modulators: a strip-loaded slot waveguide. Waveguide loss for undoped waveguides of 6.5 ± 0.2 dB/cm was achieved with 40 nm thick strip-loading, with the full silicon thickness around 220 nm and a slot size of 200 nm, for wavelengths near 1550 nm.