A portable, benchtop photolithography system based on a solid-state light source.
作者信息
Huntington Mark D, Odom Teri W
机构信息
Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA.
出版信息
Small. 2011 Nov 18;7(22):3144-7. doi: 10.1002/smll.201101209. Epub 2011 Sep 8.
PMID:21901830
Abstract
摘要
Zotero 插件