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一种完全通过喷墨打印制造的灵活近场传感器。

A flexible proximity sensor fully fabricated by inkjet printing.

机构信息

Department of Mechanical and Electromechanical Engineering, National ILan University, ILan 260, Taiwan.

出版信息

Sensors (Basel). 2010;10(5):5054-62. doi: 10.3390/s100505054. Epub 2010 May 19.

Abstract

A flexible proximity sensor fully fabricated by inkjet printing is proposed in this paper. The flexible proximity sensor is composed of a ZnO layer sandwiched in between a flexible aluminum sheet and a web-shaped top electrode layer. The flexible aluminum sheet serves as the bottom electrode. The material of the top electrode layer is nano silver. Both the ZnO and top electrode layers are deposited by inkjet printing. The fully inkjet printing process possesses the advantages of direct patterning and low-cost. It does not require photolithography and etching processes since the pattern is directly printed on the flexible aluminum sheet. The prototype demonstrates that the presented flexible sensor is sensitive to the human body. It may be applied to proximity sensing or thermal eradiation sensing.

摘要

本文提出了一种完全通过喷墨打印制造的灵活近场传感器。该灵活近场传感器由夹在柔性铝板和线状顶电极层之间的 ZnO 层组成。柔性铝板用作底电极。顶电极层的材料是纳米银。ZnO 和顶电极层都是通过喷墨打印沉积的。全喷墨打印工艺具有直接图案化和低成本的优点。由于图案直接打印在柔性铝板上,因此不需要光刻和蚀刻工艺。原型表明,所提出的灵活传感器对人体敏感。它可用于接近感测或热辐射感测。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b295/3292163/71025bfc1455/sensors-10-05054f1.jpg

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