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带有刻蚀衍射光栅的声廊模式谐振器。

Whispering gallery mode resonators augmented with engraved diffraction gratings.

机构信息

Quantum Sciences and Technology, Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109, USA.

出版信息

Opt Lett. 2013 Feb 1;38(3):284-6. doi: 10.1364/OL.38.000284.

Abstract

We report the demonstration of whispering gallery mode (WGM) resonators augmented with diffraction gratings. We apply focused ion beam (FIB) methods to precisely engrave a surface grating directly into the perimeter of a crystalline disc. The grating provides a simple and highly directional free-space coupling mechanism with superior stability to evanescent coupling techniques. These integrated gratings can also provide control of the resonance spectrum, significantly reducing the mode density. Our FIB fabrication process does not introduce significant loss; Q≃3×10(7) has been demonstrated. The wavelength dependence of the diffraction angle was found to be in excellent agreement with grating theory. The versatility of spectral control and far-field grating coupling will have significant impact in WGM resonator applications in lasers, sensors, and optoelectronics.

摘要

我们展示了带有衍射光栅的 whispering gallery mode(WGM)谐振器的演示。我们应用聚焦离子束(FIB)方法精确地将表面光栅直接刻蚀到晶圆盘的周边。该光栅提供了一种简单且高度定向的自由空间耦合机制,与消逝场耦合技术相比具有更高的稳定性。这些集成光栅还可以控制共振光谱,显著降低模式密度。我们的 FIB 制造工艺不会引入显著的损耗;已经证明 Q≃3×10(7)。衍射角的波长依赖性与光栅理论非常吻合。光谱控制和远场光栅耦合的多功能性将对 WGM 谐振器在激光、传感器和光电子学中的应用产生重大影响。

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