Mechanosynthesis Group, Department of Mechanical Engineering, University of Michigan, 2350 Hayward Street, Ann Arbor, Michigan 48109, United States.
ACS Nano. 2013 Apr 23;7(4):3565-80. doi: 10.1021/nn400507y. Epub 2013 Mar 15.
While many promising applications have been demonstrated for vertically aligned carbon nanotube (CNT) forests, lack of consistency in results (e.g., CNT quality, height, and density) continues to hinder knowledge transfer and commercialization. For example, it is well known that CNT growth can be influenced by small concentrations of water vapor, carbon deposits on the reactor wall, and experiment-to-experiment variations in pressure within the reaction chamber. However, even when these parameters are controlled during synthesis, we found that variations in ambient lab conditions can overwhelm attempts to perform parametric optimization studies. We established a standard growth procedure, including the chemical vapor deposition (CVD) recipe, while we varied other variables related to the furnace configuration and experimental procedure. Statistical analysis of 280 samples showed that ambient humidity, barometric pressure, and sample position in the CVD furnace contribute significantly to experiment-to-experiment variation. We investigated how these factors lead to CNT growth variation and recommend practices to improve process repeatability. Initial results using this approach reduced run-to-run variation in CNT forest height and density by more than 50%.
尽管垂直排列的碳纳米管(CNT)森林已经展示出了许多有前途的应用,但结果的不一致性(例如 CNT 的质量、高度和密度)仍然阻碍了知识的转移和商业化。例如,众所周知,水蒸气的小浓度、反应器壁上的碳沉积物以及反应室内的压力在实验之间的变化都会影响 CNT 的生长。然而,即使在合成过程中控制这些参数,我们发现环境实验室条件的变化也会使进行参数优化研究的尝试变得困难重重。我们建立了一个标准的生长程序,包括化学气相沉积(CVD)配方,同时我们还改变了与炉型和实验程序有关的其他变量。对 280 个样本的统计分析表明,环境湿度、气压和 CVD 炉中的样品位置对实验之间的变化有显著影响。我们研究了这些因素如何导致 CNT 生长的变化,并提出了改进工艺重复性的建议。使用这种方法的初步结果使 CNT 森林高度和密度的运行间变化减少了 50%以上。