基于锯齿波热光频率调制器的绝缘体上硅集成外差激光多普勒振动计。

Heterodyne laser Doppler vibrometers integrated on silicon-on-insulator based on serrodyne thermo-optic frequency shifters.

作者信息

Li Yanlu, Verstuyft Steven, Yurtsever Gunay, Keyvaninia Shahram, Roelkens Gunther, Van Thourhout Dries, Baets Roel

机构信息

Photonics Research Group, Department of Information Technology, Ghent-University-Interuniversitair Micro-Elektronica Centrum, Ghent, Belgium.

出版信息

Appl Opt. 2013 Apr 1;52(10):2145-52. doi: 10.1364/AO.52.002145.

DOI:10.1364/AO.52.002145

PMID:23545970

Abstract

Miniaturized laser Doppler vibrometers (LDVs) have many advantages over conventional bulk LDVs. In this paper, the realization of a miniaturized heterodyne LDV integrated on silicon-on-insulator substrate is reported. The optical frequency shifters in these on-chip LDVs employ a serrodyne technique, and they generate a frequency shift at 2 kHz. Vibrations of a mirror for the frequency range between 1.1 and 123 Hz and the velocity range between 0.8 and 400 μm/s are measured by both an on-chip LDV and a commercial LDV. The measurement results agree well. A compensation method for the influence of on-chip spurious reflections is also demonstrated.

摘要

小型激光多普勒振动计（LDV）与传统的大型LDV相比具有许多优势。本文报道了一种集成在绝缘体上硅衬底上的小型外差LDV的实现。这些片上LDV中的光学频率移位器采用锯齿波技术，它们产生2kHz的频率移位。通过片上LDV和商用LDV测量了频率范围在1.1至123Hz之间且速度范围在0.8至400μm/s之间的镜子振动。测量结果吻合良好。还展示了一种针对片上杂散反射影响的补偿方法。