基于通量集中与调制的磁阻传感器，集成平面补偿线圈。

Flux concentration and modulation based magnetoresistive sensor with integrated planar compensation coils.

作者信息

Tian Wugang, Hu Jiafei, Pan Mengchun, Chen Dixiang, Zhao Jianqiang

机构信息

College of Mechatronics and Automation, National University of Defense Technology, Changsha, 410073, China.

出版信息

Rev Sci Instrum. 2013 Mar;84(3):035004. doi: 10.1063/1.4796094.

DOI:10.1063/1.4796094

PMID:23556843

Abstract

1∕f noise is one of the main noise sources of magnetoresistive (MR) sensors, which can cause intrinsic detection limit at low frequency. To suppress this noise, the solution of flux concentration and vertical motion modulation (VMM) has been proposed. Magnetic hysteresis in MR sensors is another problem, which degrades their response linearity and detection ability. To reduce this impact, the method of pulse magnetization and magnetic compensation field with integrated planar coils has been introduced. A flux concentration and VMM based magnetoresistive prototype sensor with integrated planar coils was fabricated using microelectromechanical-system technology. The response linearity of the prototype sensors is improved from 0.8% to 0.12%. The noise level is reduced near to the thermal noise level, and the low-frequency detection ability of the prototype sensor is enhanced with a factor of more than 80.

摘要

1/f 噪声是磁阻（MR）传感器的主要噪声源之一，它会在低频时导致固有检测极限。为了抑制这种噪声，人们提出了磁通集中和垂直运动调制（VMM）的解决方案。MR 传感器中的磁滞是另一个问题，它会降低传感器的响应线性度和检测能力。为了减少这种影响，人们引入了脉冲磁化和带有集成平面线圈的磁补偿场的方法。利用微机电系统技术制造了一种基于磁通集中和 VMM 且带有集成平面线圈的磁阻原型传感器。原型传感器的响应线性度从 0.8%提高到了 0.12%。噪声水平降低到接近热噪声水平，并且原型传感器的低频检测能力提高了 80 多倍。