Institute of Nanotechnology, Karlsruhe Institute of Technology, 76344 Eggenstein-Leopoldshafen, Germany.
Beilstein J Nanotechnol. 2013 May 7;4:300-5. doi: 10.3762/bjnano.4.33. Print 2013.
Synthetic diamond films can be prepared on a waferscale by using chemical vapour deposition (CVD) on suitable substrates such as silicon or silicon dioxide. While such films find a wealth of applications in thermal management, in X-ray and terahertz window design, and in gyrotron tubes and microwave transmission lines, their use for nanoscale optical components remains largely unexplored. Here we demonstrate that CVD diamond provides a high-quality template for realizing nanophotonic integrated optical circuits. Using efficient grating coupling devices prepared from partially etched diamond thin films, we investigate millimetre-sized optical circuits and achieve single-mode waveguiding at telecoms wavelengths. Our results pave the way towards broadband optical applications for sensing in harsh environments and visible photonic devices.
合成钻石薄膜可以通过在合适的衬底(如硅或二氧化硅)上进行化学气相沉积(CVD)来实现晶圆级制备。虽然这些薄膜在热管理、X 射线和太赫兹窗口设计以及回旋管和微波传输线中有着广泛的应用,但它们在纳米光学元件中的应用仍在很大程度上尚未得到探索。在这里,我们证明 CVD 钻石可为实现纳米光子集成光电路提供高质量的模板。我们使用从部分蚀刻的钻石薄膜制备的高效光栅耦合器件,研究了毫米级大小的光电路,并在电信波长下实现了单模波导。我们的研究结果为在恶劣环境中进行传感的宽带光学应用和可见光光子器件铺平了道路。