使用三维质谱成像的回顾性溅射深度剖析。
Retrospective sputter depth profiling using 3D mass spectral imaging.
作者信息
Zheng Leiliang, Wucher Andreas, Winograd Nicholas
机构信息
Department of Chemistry, Pennsylvania State University, University Park, PA 16802, USA.
Faculty of Physics, University Duisburg-Essen, 47048 Duisburg, Germany.
出版信息
Surf Interface Anal. 2011 Feb;43(1-2). doi: 10.1002/sia.3509.
A molecular multilayer stack composed of alternating Langmuir-Blodgett films was analyzed by ToF-SIMS imaging in combination with intermediate sputter erosion using a focused C cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field-of-view can be extracted in retrospect, allowing the influence of the gating area on the apparent depth resolution to be assessed. In a similar way, the observed degradation of depth resolution with increasing depth of the analyzed interface can be analyzed in order to determine the 'intrinsic' depth resolution of the method.
通过使用聚焦的C簇离子束，结合中间溅射侵蚀的飞行时间二次离子质谱成像（ToF-SIMS成像），对由交替的朗缪尔-布洛杰特（Langmuir-Blodgett）膜组成的分子多层堆叠进行了分析。从所得数据集中，可以事后提取分析视场中任何所需横向部分的深度剖面，从而能够评估门控区域对表观深度分辨率的影响。以类似的方式，可以分析随着被分析界面深度增加而观察到的深度分辨率下降情况，以便确定该方法的“固有”深度分辨率。
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