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二氧化锡薄膜的合成、表征及介电性能

Synthesis, characterization and dielectric properties of SnO2 thin films.

作者信息

Yıldırım M Ali, Yıldırım Sümeyra Tuna, Sakar Emine Fedakar, Ateş Aytunç

机构信息

Department of Physics, Science and Art Faculty, Erzincan University, Erzincan, Turkey.

Department of Chemistry, Science and Art Faculty, Erzincan University, Erzincan, Turkey.

出版信息

Spectrochim Acta A Mol Biomol Spectrosc. 2014 Dec 10;133:60-5. doi: 10.1016/j.saa.2014.05.035. Epub 2014 May 28.

Abstract

SnO2 thin films have been grown on glass substrates using Successive Ionic Layer Adsorption and Reaction (SILAR) method at room temperature and ambient pressure. The annealing temperature effect on the structural, morphological, optical and electrical properties of SnO2 thin films has been investigated. The X-ray Diffraction (XRD) and Scanning Electron Microscopy (SEM) studies have showed that all the films have exhibited polycrystalline nature with tetragonal structure and have been covered well on glass substrates. The crystalline and surface properties of the films have improved with increasing annealing temperature. The band gap values have been changed from 3.73 to 3.66eV depending on the annealing temperature. The refractive index (n), optical static and high frequency dielectric constants (εo, ε∞) values have been calculated as a function of the annealing temperature. The resistivity values of the films have changed between 10(-1) - 10(-3)Ωcm with annealing temperature and light at room temperature.

摘要

采用连续离子层吸附与反应(SILAR)法在室温及常压下于玻璃衬底上生长了SnO₂薄膜。研究了退火温度对SnO₂薄膜结构、形貌、光学和电学性能的影响。X射线衍射(XRD)和扫描电子显微镜(SEM)研究表明,所有薄膜均呈现四方结构的多晶性质,且在玻璃衬底上覆盖良好。随着退火温度的升高,薄膜的结晶和表面性能得到改善。带隙值随退火温度从3.73 eV变化到3.66 eV。计算了折射率(n)、光学静态和高频介电常数(εo、ε∞)随退火温度的函数值。薄膜的电阻率值在室温下随退火温度和光照在10⁻¹ - 10⁻³Ω·cm之间变化。

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