da Silva S Filipe Covre, Lanzoni E M, Barboza V de Araujo, Malachias A, Kiravittaya S, Deneke Ch
Nanotechnology. 2014 Nov 14;25(45):455603. doi: 10.1088/0957-4484/25/45/455603. Epub 2014 Oct 24.
Partly released, relaxed and wrinkled InGaAs membranes are used as virtual substrates for overgrowth with InAs. Such samples exhibit different lattice parameters for the unreleased epitaxial parts, the released flat, back-bond areas and the released wrinkled areas. A large InAs migration towards the released membrane is observed with a material accumulation on top of the freestanding wrinkles during overgrowth. A semi-quantitative analysis of the misfit strain shows that the material migrates to the areas of the sample with the lowest misfit strain, which we consider as the areas of the lowest chemical potential of the surface. Material migration is also observed for the edge-supported, freestanding InGaAs membranes found on these samples. Our results show that the released, wrinkled nanomembranes offer a growth template for InAs deposition that fundamentally changes the migration behavior of the deposited material on the growth surface.
部分释放、松弛且有褶皱的铟镓砷(InGaAs)薄膜用作铟砷(InAs)外延生长的虚拟衬底。此类样品在未释放的外延部分、释放的平坦背键合区域以及释放的褶皱区域呈现出不同的晶格参数。在外延生长过程中,观察到大量的InAs向释放的薄膜迁移,且在独立褶皱顶部有材料堆积。对失配应变的半定量分析表明,材料迁移至样品中失配应变最低的区域,我们将其视为表面化学势最低的区域。在这些样品上发现的边缘支撑独立InGaAs薄膜也观察到了材料迁移。我们的结果表明,释放的、有褶皱的纳米薄膜为InAs沉积提供了一个生长模板,从根本上改变了沉积材料在生长表面的迁移行为。