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通过等离子体共振和耦合增强超薄平面透镜的聚焦能量。

Enhancement of focusing energy of ultra-thin planar lens through plasmonic resonance and coupling.

作者信息

Jiao J, Zhao Q, Li X, Liang G F, Huang X P, Luo X G

出版信息

Opt Express. 2014 Oct 20;22(21):26277-84. doi: 10.1364/OE.22.026277.

Abstract

A metal-insulator-metal (MIM) structure which is used to enhance the focusing energy of planar lens is developed in this work. The top of the MIM structure is formed by circularly arranged V-shaped nanoantennas whose double resonance effect makes it possible for light to obtain great phase changes within an ultra-thin area. The middle and bottom of the structure is medium and gold film layer respectively. This structure produces plasmonic coupling between the antenna layer and gold film, thus reducing Ohmic loss and enhancing the effect of plasmonic excitation. When the distance between the antenna layer with a thickness of 30 nm and gold film is 88 nm, and the thickness of gold film is 20 nm, the enhancement of plasmonic coupling reaches to the strongest when the focusing intensity is 1.33 times higher than the lens only. With the advantages of small size, ultra-thin, great phase changes and high-efficient focusing ability, the enhanced plasmonic coupling lens structure can be widely applied in photoetching, and integrated optics.

摘要

本工作中开发了一种用于增强平面透镜聚焦能量的金属-绝缘体-金属(MIM)结构。MIM结构的顶部由圆形排列的V形纳米天线构成,其双共振效应使光能够在超薄区域内获得很大的相位变化。该结构的中间和底部分别为介质层和金膜层。这种结构在天线层和金膜之间产生等离子体耦合,从而降低欧姆损耗并增强等离子体激发效果。当厚度为30nm的天线层与金膜之间的距离为88nm且金膜厚度为20nm时,等离子体耦合增强达到最强,此时聚焦强度比仅使用透镜时高1.33倍。由于具有尺寸小、超薄、相位变化大以及聚焦能力高效等优点,增强型等离子体耦合透镜结构可广泛应用于光刻和集成光学领域。

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