Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States.
Nano Lett. 2015 Jan 14;15(1):416-21. doi: 10.1021/nl5037484. Epub 2014 Dec 3.
The emergence of semiconducting materials with inert or dangling bond-free surfaces has created opportunities to form van der Waals heterostructures without the constraints of traditional epitaxial growth. For example, layered two-dimensional (2D) semiconductors have been incorporated into heterostructure devices with gate-tunable electronic and optical functionalities. However, 2D materials present processing challenges that have prevented these heterostructures from being produced with sufficient scalability and/or homogeneity to enable their incorporation into large-area integrated circuits. Here, we extend the concept of van der Waals heterojunctions to semiconducting p-type single-walled carbon nanotube (s-SWCNT) and n-type amorphous indium gallium zinc oxide (a-IGZO) thin films that can be solution-processed or sputtered with high spatial uniformity at the wafer scale. The resulting large-area, low-voltage p-n heterojunctions exhibit antiambipolar transfer characteristics with high on/off ratios that are well-suited for electronic, optoelectronic, and telecommunication technologies.
具有惰性或悬空键自由表面的半导体材料的出现为形成范德华异质结构提供了机会,而无需受传统外延生长的限制。例如,层状二维(2D)半导体已被纳入具有栅极可调谐电子和光学功能的异质结构器件中。然而,2D 材料存在加工挑战,这些挑战阻止了这些异质结构具有足够的可扩展性和/或均一性,从而将其纳入大面积集成电路中。在这里,我们将范德华异质结的概念扩展到可以通过溶液处理或溅射在晶圆级上以高空间均匀性制备的 p 型单壁碳纳米管(s-SWCNT)和 n 型非晶铟镓锌氧化物(a-IGZO)薄膜。所得到的大面积、低压 p-n 异质结具有高开关比的反双极转移特性,非常适合电子、光电和电信技术。