具有不同覆盖层的十字形霍尔板的性能比较。

Performance comparison of cross-like Hall plates with different covering layers.

作者信息

Lyu Fei, Zhang Zhenyan, Toh Eng-Huat, Liu Xinfu, Ding Yinjie, Pan Yifan, Li Chengjie, Li Li, Sha Jin, Pan Hongbing

机构信息

School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China.

GLOBALFOUNDRIES Singapore, Singapore 738406, Singapore.

出版信息

Sensors (Basel). 2014 Dec 31;15(1):672-86. doi: 10.3390/s150100672.

DOI:10.3390/s150100672

PMID:25559001

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4327042/

Abstract

This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.

摘要

本文研究了覆盖层对十字形霍尔板性能的影响。设计并分析了三种不同尺寸的十字形霍尔板结构。使用自行搭建的测量系统对霍尔板的灵敏度和失调进行了表征。针对不同的霍尔板设计，研究了有源区上P型区域对与电流相关的灵敏度的影响。此外，分析了P型覆盖层与失调之间的相关性。确定了三种设计中最佳的结构。此外，通过考虑失调，提出了一种改进的霍尔板八电阻电路模型，其精度得到了提高。