基于声化学合成的SrTi0.6Fe0.4O2.8（STFO40）的低功耗电阻式氧传感器。

Low Power Resistive Oxygen Sensor Based on Sonochemical SrTi0.6Fe0.4O2.8 (STFO40).

作者信息

Stratulat Alisa, Serban Bogdan-Catalin, de Luca Andrea, Avramescu Viorel, Cobianu Cornel, Brezeanu Mihai, Buiu Octavian, Diamandescu Lucian, Feder Marcel, Ali Syed Zeeshan, Udrea Florin

机构信息

Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania.

Centre for Advanced Photonics and Electronics (CAPE), University of Cambridge, Cambridge CB3 0FA, UK.

出版信息

Sensors (Basel). 2015 Jul 20;15(7):17495-506. doi: 10.3390/s150717495.

DOI:10.3390/s150717495

PMID:26205267

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4541946/

Abstract

The current paper reports on a sonochemical synthesis method for manufacturing nanostructured (typical grain size of 50 nm) SrTi0.6Fe0.4O2.8 (Sono-STFO40) powder. This powder is characterized using X ray-diffraction (XRD), Mössbauer spectroscopy and Scanning Electron Microscopy (SEM), and results are compared with commercially available SrTi0.4Fe0.6O2.8 (STFO60) powder. In order to manufacture resistive oxygen sensors, both Sono-STFO40 and STFO60 are deposited, by dip-pen nanolithography (DPN) method, on an SOI (Silicon-on-Insulator) micro-hotplate, employing a tungsten heater embedded within a dielectric membrane. Oxygen detection tests are performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 16% (v/v), at a constant heater temperature of 650 °C. The oxygen sensor, based on the Sono-STFO40 sensing layer, shows good sensitivity, low power consumption (80 mW), and short response time (25 s). These performance are comparable to those exhibited by state-of-the-art O2 sensors based on STFO60, thus proving Sono-STFO40 to be a material suitable for oxygen detection in harsh environments.

摘要

本文报道了一种用于制备纳米结构（典型晶粒尺寸为50纳米）的SrTi0.6Fe0.4O2.8（声化学合成的STFO40）粉末的声化学合成方法。使用X射线衍射（XRD）、穆斯堡尔光谱和扫描电子显微镜（SEM）对该粉末进行了表征，并将结果与市售的SrTi0.4Fe0.6O2.8（STFO60）粉末进行了比较。为了制造电阻式氧传感器，通过浸笔纳米光刻（DPN）方法，将声化学合成的STFO40和STFO60沉积在一个绝缘体上硅（SOI）微热板上，该微热板采用嵌入介电膜内的钨加热器。在干燥（相对湿度=0%）和潮湿（相对湿度=60%）的氮气气氛中进行氧检测测试，氧浓度在1%至16%（体积/体积）之间变化，加热器温度恒定为650℃。基于声化学合成的STFO40传感层的氧传感器表现出良好的灵敏度、低功耗（80毫瓦）和短响应时间（25秒）。这些性能与基于STFO60的最先进的氧气传感器所表现出的性能相当，从而证明声化学合成的STFO４０是一种适用于恶劣环境中氧检测的材料。