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用于粘合剂集成的柔性和可拉伸电子传感器的可扩展微加工工艺

Scalable Microfabrication Procedures for Adhesive-Integrated Flexible and Stretchable Electronic Sensors.

作者信息

Kang Dae Y, Kim Yun-Soung, Ornelas Gladys, Sinha Mridu, Naidu Keerthiga, Coleman Todd P

机构信息

Department of Bioengineering, University of California San Diego, La Jolla, CA 92093, USA.

出版信息

Sensors (Basel). 2015 Sep 16;15(9):23459-76. doi: 10.3390/s150923459.

Abstract

New classes of ultrathin flexible and stretchable devices have changed the way modern electronics are designed to interact with their target systems. Though more and more novel technologies surface and steer the way we think about future electronics, there exists an unmet need in regards to optimizing the fabrication procedures for these devices so that large-scale industrial translation is realistic. This article presents an unconventional approach for facile microfabrication and processing of adhesive-peeled (AP) flexible sensors. By assembling AP sensors on a weakly-adhering substrate in an inverted fashion, we demonstrate a procedure with 50% reduced end-to-end processing time that achieves greater levels of fabrication yield. The methodology is used to demonstrate the fabrication of electrical and mechanical flexible and stretchable AP sensors that are peeled-off their carrier substrates by consumer adhesives. In using this approach, we outline the manner by which adhesion is maintained and buckling is reduced for gold film processing on polydimethylsiloxane substrates. In addition, we demonstrate the compatibility of our methodology with large-scale post-processing using a roll-to-roll approach.

摘要

新型超薄柔性可拉伸设备改变了现代电子产品与目标系统交互的设计方式。尽管越来越多的新技术涌现并引领着我们对未来电子产品的思考方式,但在优化这些设备的制造工艺以实现大规模工业转化方面仍存在未满足的需求。本文提出了一种用于简便微加工和处理粘性剥离(AP)柔性传感器的非常规方法。通过以倒置方式将AP传感器组装在弱粘性基板上,我们展示了一种端到端处理时间减少50%且制造良率更高的工艺。该方法用于演示通过消费级粘合剂从其载体基板上剥离的电气和机械柔性可拉伸AP传感器的制造。在使用这种方法时,我们概述了在聚二甲基硅氧烷基板上进行金膜加工时保持附着力和减少屈曲的方式。此外,我们展示了我们的方法与使用卷对卷方法进行大规模后处理的兼容性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3307/4610501/f33e6925ca3e/sensors-15-23459-g001.jpg

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