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经十八烷基三氯硅烷沉积和正十八烷涂覆处理的硅纳米线/纳米墙的表面特性。

Surface Characteristics of Silicon Nanowires/Nanowalls Subjected to Octadecyltrichlorosilane Deposition and n-octadecane Coating.

机构信息

Mechanical Engineering Department, King Fahd University of Petroleum &Minerals, Dhahran, Saudi Arabia.

Centre of Excellence in Renewable Energy, King Fahd University of Petroleum &Minerals, Dhahran, Saudi Arabia.

出版信息

Sci Rep. 2016 Dec 9;6:38678. doi: 10.1038/srep38678.

Abstract

In this study, nanowires/nanowalls were generated on a silicon wafer through a chemical etching method. Octadecyltrichlorosilane (OTS) was deposited onto the nanowire/nanowall surfaces to alter their hydrophobicity. The hydrophobic characteristics of the surfaces were further modified via a 1.5-μm-thick layer of n-octadecane coating on the OTS-deposited surface. The hydrophobic characteristics of the resulting surfaces were assessed using the sessile water droplet method. Scratch and ultraviolet (UV)-visible reflectivity tests were conducted to measure the friction coefficient and reflectivity of the surfaces. The nanowires formed were normal to the surface and uniformly extended 10.5 μm to the wafer surface. The OTS coating enhanced the hydrophobic state of the surface, and the water contact angle increased from 27° to 165°. The n-octadecane coating formed on the OTS-deposited nanowires/nanowalls altered the hydrophobic state of the surface. This study provides the first demonstration that the surface wetting characteristics change from hydrophobic to hydrophilic after melting of the n-octadecane coating. In addition, this change is reversible; i.e., the hydrophilic surface becomes hydrophobic after the n-octadecane coating solidifies at the surface, and the process again occurs in the opposite direction after the n-octadecane coating melts.

摘要

在这项研究中,通过化学蚀刻法在硅片上生成了纳米线/纳米墙。十八烷基三氯硅烷(OTS)被沉积在纳米线/纳米墙表面,以改变它们的疏水性。通过在 OTS 沉积表面上涂覆 1.5μm 厚的正十八烷层,进一步修饰了表面的疏水性特征。使用固着液滴法评估了所得表面的疏水性特征。进行了划痕和紫外(UV)-可见反射率测试,以测量表面的摩擦系数和反射率。形成的纳米线垂直于表面,均匀地延伸到晶圆表面 10.5μm。OTS 涂层增强了表面的疏水性状态,水接触角从 27°增加到 165°。在 OTS 沉积的纳米线/纳米墙上形成的正十八烷涂层改变了表面的疏水性状态。这项研究首次证明,在正十八烷涂层融化后,表面的润湿特性从疏水变为亲水。此外,这种变化是可逆的;也就是说,正十八烷涂层在表面固化后,亲水面变得疏水,而在正十八烷涂层融化后,又再次朝着相反的方向发生变化。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/5146678/d11d826caff9/srep38678-f1.jpg

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