Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, Taiwan.
Material and Chemical Research Laboratories, Industrial technology Research Institute, Hsinchu, Taiwan.
Biosens Bioelectron. 2017 Apr 15;90:349-355. doi: 10.1016/j.bios.2016.12.011. Epub 2016 Dec 6.
A flexible and miniaturized metal semiconductor metal (MSM) biomolecular photodetector was developed as the core photocurrent system through chemiluminescence for hydrogen peroxide sensing. The flexible photocurrent sensing system was manufactured on a 30-µm-thick crystalline silicon chip by chemical etching process, which produced a flexible silicon chip. A surface texturization design on the flexible device enhanced the light-trapping effect and minimized reflectivity losses from the incident light. The model protein streptavidin bound to horseradish peroxidase (HRP) was successfully immobilized onto the sensor surface through high-affinity conjugation with biotin. The luminescence reaction occurred with luminol, hydrogen peroxide and HRP enzyme, and the emission of light from the catalytic reaction was detected by underlying flexible photodetector. The chemiluminescence in the miniaturized photocurrent sensing system was successfully used to determine the hydrogen peroxide concentration in real-time analyses. The hydrogen peroxide detection limit of the flexible MSM photodetector was 2.47mM. The performance of the flexible MSM photodetector maintained high stability under bending at various bending radii. Moreover, for concave bending, a significant improvement in detection signal intensity (14.5% enhancement compared with a flat configuration) was observed because of the increased photocurrent, which was attributed to enhancement of light trapping. Additionally, this detector was used to detect hydrogen peroxide concentrations in commercial hair dye products, which is a significant issue in the healthcare field. The development of this novel, flexible and miniaturized MSM biomolecular photodetector with excellent mechanical flexibility and high sensitivity demonstrates the applicability of this approach to future wearable sensor development efforts.
一种灵活的小型金属半导体金属(MSM)生物分子光电探测器作为核心光电流系统,通过化学发光法用于过氧化氢感测。灵活的光电流感测系统通过化学蚀刻工艺在 30µm 厚的结晶硅芯片上制造,从而产生了灵活的硅芯片。在柔性器件上进行表面织构化设计增强了光捕获效应,并最小化了入射光的反射损失。模型蛋白链霉亲和素通过生物素的高亲和力结合成功固定在传感器表面上。辣根过氧化物酶(HRP)与发光试剂鲁米诺、过氧化氢发生发光反应,通过底层的柔性光电探测器检测到光的发射。小型化光电流感测系统中的化学发光成功地用于实时分析过氧化氢浓度的测定。柔性 MSM 光电探测器的过氧化氢检测限为 2.47mM。在各种弯曲半径下,柔性 MSM 光电探测器的性能保持高度稳定。此外,对于凹面弯曲,由于光电流的增加,检测信号强度显著提高(与平面构型相比提高了 14.5%),这归因于光捕获的增强。此外,该探测器还用于检测商业染发剂产品中的过氧化氢浓度,这在医疗保健领域是一个重要问题。这种新型灵活的小型 MSM 生物分子光电探测器具有优异的机械柔韧性和高灵敏度,展示了这种方法在未来可穿戴传感器开发中的适用性。