Chen Siming, Liao Mengya, Tang Mingchu, Wu Jiang, Martin Mickael, Baron Thierry, Seeds Alwyn, Liu Huiyun
Opt Express. 2017 Mar 6;25(5):4632-4639. doi: 10.1364/OE.25.004632.
We report on the first electrically pumped continuous-wave (cw) InAs/GaAs quantum dot (QD) lasers monolithically grown on on-axis Si (001) substrates without any intermediate buffer layers. A 400 nm antiphase boundary (APB) free epitaxial GaAs film with a small root-mean-square (RMS) surface roughness of 0.86 nm was first deposited on a 300 mm standard industry-compatible on-axis Si (001) substrate by metal-organic chemical vapor deposition (MOCVD). The QD laser structure was then grown on this APB-free GaAs/Si (001) virtual substrate by molecular beam epitaxy (MBE). Room-temperature cw lasing at ~1.3 µm has been achieved with a threshold current density of 425 A/cm and single facet output power of 43 mW. Under pulsed operation, lasing operation up to 102 °C has been realized, with a threshold current density of 250 A/cm and single facet output power exceeding 130 mW at room temperature.
我们报道了首个在无任何中间缓冲层的轴向Si(001)衬底上单片生长的电泵浦连续波(CW) InAs/GaAs量子点(QD)激光器。首先通过金属有机化学气相沉积(MOCVD)在300mm标准工业兼容轴向Si(001)衬底上沉积了一个400nm无反相边界(APB)的外延GaAs薄膜,其均方根(RMS)表面粗糙度小,为0.86nm。然后通过分子束外延(MBE)在这个无APB的GaAs/Si(001)虚拟衬底上生长量子点激光器结构。已实现室温连续波激射,波长约为1.3μm,阈值电流密度为425A/cm²,单面输出功率为43mW。在脉冲工作模式下,已实现高达102°C的激射工作,室温下阈值电流密度为250A/cm²,单面输出功率超过130mW。