RuAl（x = 50、55、60、67）薄膜成分对其热稳定性的影响

The Influence of the Composition of RuAl (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability.

作者信息

Seifert Marietta, Rane Gayatri K, Oswald Steffen, Menzel Siegfried B, Gemming Thomas

机构信息

IFW Dresden, SAWLab Saxony, P.O. Box 270116, 01171 Dresden, Germany.

出版信息

Materials (Basel). 2017 Mar 10;10(3):277. doi: 10.3390/ma10030277.

DOI:10.3390/ma10030277

PMID:28772637

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5503342/

Abstract

RuAl thin films possess a high potential as a high temperature stable metallization for surface acoustic wave devices. During the annealing process of the Ru-Al films, Al 2 O 3 is formed at the surface of the films even under high vacuum conditions, so that the composition of a deposited Ru 50 Al 50 film is shifted to a Ru-rich alloy. To compensate for this effect, the Al content is systematically increased during the deposition of the Ru-Al films. Three Al-rich alloys-Ru 45 Al 55 , Ru 40 Al 60 and Ru 33 Al 67 -were analyzed concerning their behavior after high temperature treatment under high vacuum and air conditions in comparison to the initial Ru 50 Al 50 sample. Although the films' cross sections show a more homogeneous structure in the case of the Al-rich films, the RuAl phase formation is reduced with increasing Al content.

摘要

钌铝薄膜作为表面声波器件的高温稳定金属化材料具有很高的潜力。在钌铝薄膜的退火过程中，即使在高真空条件下，薄膜表面也会形成氧化铝，从而使沉积的Ru50Al50薄膜的成分转变为富钌合金。为了补偿这种影响，在钌铝薄膜沉积过程中系统地增加了铝含量。与初始的Ru50Al50样品相比，分析了三种富铝合金Ru45Al55、Ru40Al60和Ru33Al67在高真空和空气条件下高温处理后的行为。尽管富铝薄膜的横截面显示出更均匀的结构，但随着铝含量的增加，钌铝相的形成减少。