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CVD 生长的 MoS 场效应晶体管中晶界的噪声产生和电导分析。

Analysis of noise generation and electric conduction at grain boundaries in CVD-grown MoS field effect transistors.

出版信息

Nanotechnology. 2017 Nov 24;28(47):47LT01. doi: 10.1088/1361-6528/aa9236.

Abstract

Grain boundaries in a chemical vapour deposition (CVD)-grown monolayer of MoS induce significant effects on the electrical and low frequency noise characteristics of the MoS. Here, we investigated the electrical properties and noise characteristics of MoS field effect transistors (FETs) made with CVD-grown monolayer MoS. The electrical and noise characteristics of MoS FETs were analysed and compared for the MoS channel layers with and without grain boundaries. The grain boundary in the CVD-grown MoS FETs can be the dominant noise source, and dependence of the extracted Hooge parameters on the gate voltage indicated the domination of the correlated number-mobility fluctuation at the grain boundaries. The percolative noise characteristics of the single grain regions of MoS were concealed by the noise generated at the grain boundary. This study can enhance understanding of the electrical transport hindrance and significant noise generation by trapped charges at grain boundaries of the CVD-grown MoS devices.

摘要

化学气相沉积(CVD)生长的单层 MoS 中的晶界对 MoS 的电学和低频噪声特性有显著影响。在这里,我们研究了由 CVD 生长的单层 MoS 制成的 MoS 场效应晶体管(FET)的电学和噪声特性。分析和比较了具有和不具有晶界的 MoS 沟道层的 MoS FET 的电特性和噪声特性。CVD 生长的 MoS FET 中的晶界可能是主要的噪声源,并且提取的 Hooge 参数对栅极电压的依赖性表明晶界处相关的数-迁移率涨落占主导地位。单个晶粒区域的渗流噪声特性被晶界处产生的噪声所掩盖。这项研究可以提高对 CVD 生长的 MoS 器件晶界处俘获电荷引起的电输运障碍和显著噪声产生的理解。

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