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基于导向型 CdS 纳米墙的底栅三栅晶体管和亚微秒光电探测器

Bottom-Up Tri-gate Transistors and Submicrosecond Photodetectors from Guided CdS Nanowalls.

机构信息

Department of Materials and Interfaces and ‡Chemical Research Support, Weizmann Institute of Science , Rehovot 76100, Israel.

出版信息

J Am Chem Soc. 2017 Nov 8;139(44):15958-15967. doi: 10.1021/jacs.7b09423. Epub 2017 Oct 25.

Abstract

Tri-gate transistors offer better performance than planar transistors by exerting additional gate control over a channel from two lateral sides of semiconductor nanowalls (or "fins"). Here we report the bottom-up assembly of aligned CdS nanowalls by a simultaneous combination of horizontal catalytic vapor-liquid-solid growth and vertical facet-selective noncatalytic vapor-solid growth and their parallel integration into tri-gate transistors and photodetectors at wafer scale (cm) without postgrowth transfer or alignment steps. These tri-gate transistors act as enhancement-mode transistors with an on/off current ratio on the order of 10, 4 orders of magnitude higher than the best results ever reported for planar enhancement-mode CdS transistors. The response time of the photodetector is reduced to the submicrosecond level, 1 order of magnitude shorter than the best results ever reported for photodetectors made of bottom-up semiconductor nanostructures. Guided semiconductor nanowalls open new opportunities for high-performance 3D nanodevices assembled from the bottom up.

摘要

三栅晶体管通过在半导体纳米墙(或“鳍”)的两个横向侧面施加额外的栅极控制,提供比平面晶体管更好的性能。在这里,我们报告了通过水平催化气-液-固生长和垂直面选择性非催化气-固生长的同时组合,自下而上组装排列的 CdS 纳米墙,以及在晶圆级(cm)上将其平行集成到三栅晶体管和光电探测器中,无需后生长转移或对准步骤。这些三栅晶体管作为增强型晶体管,其导通/关断电流比约为 10,比以往报道的平面增强型 CdS 晶体管的最佳结果高 4 个数量级。光电探测器的响应时间缩短到亚微秒级,比以往报道的自下而上半导体纳米结构光电探测器的最佳结果短 1 个数量级。引导半导体纳米墙为从底部向上组装的高性能 3D 纳米器件开辟了新的机会。

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