Cen Xi, van Benthem Klaus
Department of Materials Science and Engineering, University of California, Davis, Davis, CA 95616, USA.
Department of Materials Science and Engineering, University of California, Davis, Davis, CA 95616, USA.
Ultramicroscopy. 2018 Mar;186:30-34. doi: 10.1016/j.ultramic.2017.12.005. Epub 2017 Dec 6.
The gallium ion beam heating on electron transparent transmission electron microscopy (TEM) samples of Au/Ni bilayer films supported by SiO substrates was studied by in-situ TEM combined with energy dispersive X-ray spectroscopy. Brief Ga ion beam irradiation during sample transfer inside the focused ion beam instrument was found to induce dewetting of bilayer films. The observed morphological changes of the metal films are complemented by considerable Au diffusion through the underlying polycrystalline Ni film and adsorption at the Ni/substrate interface. In-situ heating experiments confirm that alterations of the metal bilayer films caused by ion beam irradiation are consistent with thermal annealing at 400 °C for several minutes in the absence of any ion bombardment. Ion beam damage effects equivalent to prolonged heating may pose considerable limitations to ion beam microscopy of samples with reduced dimensions. Ex-situ lift-out procedures of electron transparent samples in the absence of any ion beam irradiation lead to successful conservation of sample morphologies.
通过原位透射电子显微镜(TEM)结合能量色散X射线光谱,研究了在SiO衬底支撑的Au/Ni双层膜的电子透明透射电子显微镜(TEM)样品上进行镓离子束加热的情况。发现在聚焦离子束仪器内样品转移过程中进行短暂的镓离子束辐照会导致双层膜去湿。金属膜观察到的形态变化伴随着大量金穿过下面的多晶镍膜扩散并吸附在镍/衬底界面处。原位加热实验证实,离子束辐照引起的金属双层膜变化与在没有任何离子轰击的情况下在400°C下热退火几分钟一致。与长时间加热等效的离子束损伤效应可能会对尺寸减小的样品的离子束显微镜检查造成相当大的限制。在没有任何离子束辐照的情况下对电子透明样品进行非原位剥离程序可成功保存样品形态。