Gou Jun, Niu Qingchen, Liang Kai, Wang Jun, Jiang Yadong
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China.
School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, 610054, China.
Nanoscale Res Lett. 2018 Mar 5;13(1):74. doi: 10.1186/s11671-018-2484-7.
Antenna-coupled micro-bridge structure is proven to be a good solution to extend infrared micro-bolometer technology for THz application. Spiral-type antennas are proposed in 25 μm × 25 μm micro-bridge structure with a single separate linear antenna, two separate linear antennas, or two connected linear antennas on the bridge legs, in addition to traditional spiral-type antenna on the support layer. The effects of structural parameters of each antenna on THz absorption of micro-bridge structure are discussed for optimized absorption of 2.52 THz wave radiated by far infrared CO lasers. The design of spiral-type antenna with two separate linear antennas for wide absorption peak and spiral-type antenna with two connected linear antennas for relatively stable absorption are good candidates for high absorption at low absorption frequency with a rotation angle of 360*n (n = 1.6). Spiral-type antenna with extended legs also provides a highly integrated micro-bridge structure with fast response and a highly compatible, process-simplified way to realize the structure. This research demonstrates the design of several spiral-type antenna-coupled micro-bridge structures and provides preferred schemes for potential device applications in room temperature sensing and real-time imaging.
天线耦合微桥结构被证明是扩展用于太赫兹应用的红外微测辐射热计技术的一种良好解决方案。除了支撑层上的传统螺旋型天线外，还在25μm×25μm的微桥结构中提出了螺旋型天线，在桥腿上有单个独立线性天线、两个独立线性天线或两个相连线性天线。讨论了各天线结构参数对微桥结构太赫兹吸收的影响，以优化对远红外CO激光器辐射的2.52太赫兹波的吸收。具有两个独立线性天线的螺旋型天线用于宽吸收峰设计，具有两个相连线性天线的螺旋型天线用于相对稳定吸收设计，是在低吸收频率下以360*n（n = 1.6）的旋转角度实现高吸收的良好候选方案。具有延伸桥腿的螺旋型天线还提供了一种高度集成的微桥结构，具有快速响应以及实现该结构的高度兼容、工艺简化的方式。本研究展示了几种螺旋型天线耦合微桥结构的设计，并为室温传感和实时成像中的潜在器件应用提供了优选方案。
