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用于石墨烯电导率映射的太赫兹时域光谱透射和反射模式的质量评估

Quality assessment of terahertz time-domain spectroscopy transmission and reflection modes for graphene conductivity mapping.

作者信息

Mackenzie David M A, Whelan Patrick R, Bøggild Peter, Jepsen Peter Uhd, Redo-Sanchez Albert, Etayo David, Fabricius Norbert, Petersen Dirch Hjorth

出版信息

Opt Express. 2018 Apr 2;26(7):9220-9229. doi: 10.1364/OE.26.009220.

Abstract

We present a comparative study of electrical measurements of graphene using terahertz time-domain spectroscopy in transmission and reflection mode, and compare the measured sheet conductivity values to electrical van der Pauw measurements made independently in three different laboratories. Overall median conductivity variations of up to 15% were observed between laboratories, which are attributed mainly to the well-known temperature and humidity dependence of non-encapsulated graphene devices. We conclude that terahertz time-domain spectroscopy performed in either reflection mode or transmission modes are indeed very accurate methods for mapping electrical conductivity of graphene, and that both methods are interchangeable within measurement uncertainties. The conductivity obtained via terahertz time-domain spectroscopy were consistently in agreement with electrical van der Pauw measurements, while offering the additional advantages associated with contactless mapping, such as high throughput, no lithography requirement, and with the spatial mapping directly revealing the presence of any inhomogeneities or isolating defects. The confirmation of the accuracy of reflection-mode removes the requirement of a specialized THz-transparent substrate to accurately measure the conductivity.

摘要

我们展示了一项使用太赫兹时域光谱在透射和反射模式下对石墨烯进行电学测量的比较研究,并将测得的面电导率值与在三个不同实验室独立进行的范德堡电学测量结果进行比较。各实验室之间观察到总体中位数电导率变化高达15%,这主要归因于未封装的石墨烯器件众所周知的温度和湿度依赖性。我们得出结论,在反射模式或透射模式下进行的太赫兹时域光谱确实是绘制石墨烯电导率的非常准确的方法,并且这两种方法在测量不确定度范围内是可互换的。通过太赫兹时域光谱获得的电导率与范德堡电学测量结果始终一致,同时还具有与非接触式测绘相关的额外优势,例如高通量、无需光刻,并且空间测绘能直接揭示任何不均匀性或绝缘缺陷的存在。反射模式准确性的确认消除了对专门的太赫兹透明基板来准确测量电导率的需求。

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