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所有分子束外延生长的InAs/GaAs量子点激光器均位于轴向Si(001)上。

All MBE grown InAs/GaAs quantum dot lasers on on-axis Si (001).

作者信息

Kwoen Jinkwan, Jang Bongyong, Lee Joohang, Kageyama Takeo, Watanabe Katsuyuki, Arakawa Yasuhiko

出版信息

Opt Express. 2018 Apr 30;26(9):11568-11576. doi: 10.1364/OE.26.011568.

Abstract

Directly grown III-V quantum dot (QD) laser on on-axis Si (001) is a good candidate for achieving monolithically integrated Si photonics light source. Nowadays, laser structures containing high quality InAs / GaAs QD are generally grown by molecular beam epitaxy (MBE). However, the buffer layer between the on-axis Si (001) substrate and the laser structure are usually grown by metal-organic chemical vapor deposition (MOCVD). In this paper, we demonstrate all MBE grown high-quality InAs/GaAs QD lasers on on-axis Si (001) substrates without using patterning and intermediate layers of foreign material.

摘要

在同轴Si(001)上直接生长的III-V族量子点(QD)激光器是实现单片集成硅光子光源的理想选择。如今,包含高质量InAs/GaAs量子点的激光结构通常通过分子束外延(MBE)生长。然而,同轴Si(001)衬底与激光结构之间的缓冲层通常通过金属有机化学气相沉积(MOCVD)生长。在本文中,我们展示了在同轴Si(001)衬底上全由MBE生长的高质量InAs/GaAs量子点激光器,无需使用图案化和外来材料的中间层。

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