Input signal shaping based on harmonic frequency response function for suppressing nonlinear optical frequency in frequency-scanning interferometry.

Frequency-scanning interferometry (FSI) using an external cavity diode laser (ECDL) is essential for many applications of the absolute distance measurement. However, owing to the hysteresis and creep of the piezoelectric actuator inherent in the ECDL, the optical frequency scanning exhibits a nonlinearity that seriously affects the phase extraction accuracy of the interference signal and results in the reduction of the measurement accuracy. To suppress the optical frequency nonlinearity, a harmonic frequency synthesis method for shaping the desired input signal instead of the original triangular wave is presented. The effectiveness of the presented shaping method is demonstrated through the comparison of the experimental results. Compared with an incremental Renishaw interferometer, the standard deviation of the displacement measurement of the FSI system is less than 2.4 μm when driven by the shaped signal.