School of Microelectronics, Xidian University, Xi'an 710126, China.
Laboratory of Thin Film Techniques and Optical Test, Xi'an Technological University, Xi'an 710032, China.
Sensors (Basel). 2018 Dec 29;19(1):106. doi: 10.3390/s19010106.
The surface acoustic wave (SAW) gyroscopic effect in an interdigital transducer (IDT) deposited on a piezoelectric substrate is different from that in the piezoelectric substrate due to a reflection induced by IDT. In this work, an extended coupling-of-mode (COM) model including the gyroscopic effect and the reflection was developed to analyze the SAW gyroscopic effect. First, dispersion characteristics parameters of SAW were fitted according to the data derived using the finite element method (FEM). Then, variations of stop band edge frequency were calculated using the extended COM theory by integrating dispersion characteristics parameters into the COM model. We compared its results with those obtained via FEM analysis to confirm the proposed model's validity. We found that the variation in stop band edge frequency related to gyroscope effect reached the maximum value with a zero reflectivity value. For split IDT, the sensitivity of gyroscope effect is 0.036 Hz/rad/s with a lower than 1% normalized thickness. Conversely, the value of sensitivity was almost zero for bidirectional IDT and electrode width controlled single-phase unidirectional transducer (EWC/SPUDT).
叉指换能器(IDT)在压电衬底上沉积时的表面声波(SAW)陀螺效应与压电衬底中的不同,这是由于 IDT 引起的反射。在这项工作中,开发了一种扩展的耦合模式(COM)模型,包括陀螺效应和反射,以分析 SAW 陀螺效应。首先,根据有限元方法(FEM)得出的数据拟合 SAW 的色散特性参数。然后,通过将色散特性参数集成到 COM 模型中,利用扩展的 COM 理论计算截止带边缘频率的变化。我们将其结果与通过 FEM 分析获得的结果进行比较,以确认所提出模型的有效性。我们发现,与陀螺效应相关的截止带边缘频率的变化在零反射率值处达到最大值。对于分裂 IDT,陀螺效应的灵敏度为 0.036 Hz/rad/s,归一化厚度低于 1%。相反,对于双向 IDT 和电极宽度控制的单相单向换能器(EWC/SPUDT),灵敏度值几乎为零。