He Yu Ming, Yang Fu Hua, Yan Wei, Han Wei Hua, Li Zhao Feng
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Sensors (Basel). 2019 Jul 27;19(15):3305. doi: 10.3390/s19153305.
The Resonant Integrated Optic Gyroscope (RIOG) is a type of high accuracy gyroscope based on the Sagnac effect. A symmetrical resonance curve is very important to the performance of the RIOG. To further investigate and design a RIOG with a waveguide ring resonator, an in-depth research of the asymmetric resonance curve and its influence on the RIOG is fully developed. Four possible optical noises inducing the resonance curve asymmetry are analyzed and their mathematic models are established. These four optical noises are the normal mode effect, the backscattering noise, the backreflection noise and the polarization noise. Any asymmetry of the resonance curve will not only induce a large output bias error into the gyro output, but also seriously decrease the frequency discrimination parameter of the demodulation curve. By using a tunable fiber laser, the high aspect ratio silicon nitride WRR and the silicon dioxide WRR were tested. The experiment measured resonance curves can be well fitted with the theoretical simulation results. The experimental results show that a high aspect ratio silicon nitride waveguide can effectively suppress the polarization noise in the RIOG.
谐振集成光学陀螺仪(RIOG)是一种基于萨格纳克效应的高精度陀螺仪。对称的谐振曲线对RIOG的性能非常重要。为了进一步研究和设计具有波导环形谐振器的RIOG,对非对称谐振曲线及其对RIOG的影响进行了深入研究。分析了导致谐振曲线不对称的四种可能的光学噪声,并建立了它们的数学模型。这四种光学噪声是正常模式效应、背向散射噪声、背反射噪声和偏振噪声。谐振曲线的任何不对称不仅会在陀螺仪输出中引入较大的输出偏置误差,还会严重降低解调曲线的频率鉴别参数。通过使用可调谐光纤激光器,对高纵横比氮化硅波导环形谐振器和二氧化硅波导环形谐振器进行了测试。实验测量的谐振曲线与理论模拟结果拟合良好。实验结果表明,高纵横比氮化硅波导可以有效抑制RIOG中的偏振噪声。