Wang Qing, Wang Shuxiao, Zeng Youhong, Wang Wei, Cai Yan, Tu Zhijuan, Yue Wencheng, Wang Xi, Fang Qing, Yu Mingbin
Appl Opt. 2019 Jul 20;58(21):5807-5811. doi: 10.1364/AO.58.005807.
Development of the waveguide grating antenna with high directionality is significantly important for the optical phased array. A SiN/Si dual-layer structure with the grating pattern on the SiN layer is proposed to improve the directionality of the waveguide grating antenna. High directionality of more than 89% can be achieved, and the length of the waveguide grating antenna is longer than 4 mm.