Karnaushenko Daniil, Kang Tong, Bandari Vineeth K, Zhu Feng, Schmidt Oliver G
Institute for Integrative Nanosciences, Leibniz IFW Dresden, Dresden, 01069, Germany.
Material Systems for Nanoelectronics, Chemnitz University of Technology, Chemnitz, 09107, Germany.
Adv Mater. 2020 Apr;32(15):e1902994. doi: 10.1002/adma.201902994. Epub 2019 Sep 12.
Modern microelectronic systems and their components are essentially 3D devices that have become smaller and lighter in order to improve performance and reduce costs. To maintain this trend, novel materials and technologies are required that provide more structural freedom in 3D over conventional microelectronics, as well as easier parallel fabrication routes while maintaining compatability with existing manufacturing methods. Self-assembly of initially planar membranes into complex 3D architectures offers a wealth of opportunities to accommodate thin-film microelectronic functionalities in devices and systems possessing improved performance and higher integration density. Existing work in this field, with a focus on components constructed from 3D self-assembly, is reviewed, and an outlook on their application potential in tomorrow's microelectronics world is provided.
现代微电子系统及其组件本质上是三维器件,为了提高性能和降低成本,它们变得越来越小、越来越轻。为了保持这一趋势,需要新颖的材料和技术,这些材料和技术在三维空间中比传统微电子学提供更多的结构自由度,同时在保持与现有制造方法兼容性的情况下,提供更简便的并行制造路线。将初始平面膜自组装成复杂的三维结构,为在具有更高性能和更高集成密度的器件和系统中实现薄膜微电子功能提供了大量机会。本文综述了该领域的现有工作,重点是由三维自组装构建的组件,并展望了它们在未来微电子领域的应用潜力。