Fu Wenbo, Shen Huahai, Shi Liqun, Zhou Xiaosong, Long Xinggui
Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China.
Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433, China.
Nanomaterials (Basel). 2019 Nov 4;9(11):1564. doi: 10.3390/nano9111564.
A series of helium (He) charged nanograin-sized erbium (Er) films were deposited by direct current (DC)-magnetron sputtering with different He/Ar mixture gases. The microstructure and mechanical properties of He-charged Er films were investigated by X-ray diffraction (XRD), transmission electron microscopy (TEM), and nanoindentation. The helium concentrations in Er films, determined by elastic recoil detection analysis (ERDA), ranged from 0 to 49.6%, with the increase in He:Ar flow ratio up to 18:1. The XRD results show that the grain sizes of Er films decreased with and increase in He content. The embedded He atoms induced the formation of spherical nanometer He bubbles, and the diameter of the He bubbles increased with the He content. The hardness and Young's modulus increased and decreased with the decreasing grain sizes of polycrystalline Er-He films. The mechanisms of mechanical properties with respect to the grain size and He content were discussed based on the Hall-Petch formula and composite spheres model.
通过直流磁控溅射，使用不同的氦/氩混合气体沉积了一系列氦（He）注入的纳米颗粒尺寸的铒（Er）薄膜。采用X射线衍射（XRD）、透射电子显微镜（TEM）和纳米压痕技术研究了氦注入Er薄膜的微观结构和力学性能。通过弹性反冲探测分析（ERDA）确定，Er薄膜中的氦浓度范围为0至49.6%，随着He:Ar流量比增加至18:1。XRD结果表明，Er薄膜的晶粒尺寸随着He含量的增加而减小。嵌入的He原子诱导形成了球形纳米级He气泡，并且He气泡的直径随着He含量的增加而增大。多晶Er-He薄膜的硬度和杨氏模量随着晶粒尺寸的减小而增大和减小。基于霍尔-佩奇公式和复合球体模型讨论了与晶粒尺寸和He含量相关的力学性能机制。
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