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聚焦氦离子束铣削法定义的微型分形光学纳米天线。

Miniaturized fractal optical nanoantennas defined by focused helium ion beam milling.

机构信息

Institute for Applied Physics, University of Tübingen, Auf der Morgenstelle 10, D-72076 Tübingen, Germany. Center for Light-Matter-Interaction, Sensors and Analytics LISA+, University of Tübingen, Auf der Morgenstelle 15, D-72076 Tübingen, Germany.

出版信息

Nanotechnology. 2020 Feb 7;31(7):075301. doi: 10.1088/1361-6528/ab5120. Epub 2019 Nov 14.

Abstract

It has been shown in the past that fractal geometries are beneficial for radio and communication antenna designs in terms of bandwidth and gain. Recently, this concept was extended to plasmonic nanoantennas. Here, we present a fabrication method based on electron beam lithography and focused helium ion beam milling to further miniaturize dimer nanoantennas of 0th, 1st and 2nd order Sierpiński fractals. With this state-of-the-art approach, it becomes feasible to experimentally move their resonance conditions into the sub-micron wavelength regime, while maintaining excellent pattern definition and achieving sub-10 nm gap sizes for high near-field enhancement. These highly sophisticated nanostructures are numerically simulated and analyzed by dark-field scattering spectroscopy to monitor the effects of the fractal structuring on the scattering spectra and near-field enhancement.

摘要

过去已经表明,分形几何在带宽和增益方面有利于无线电和通信天线的设计。最近,这一概念被扩展到等离子体纳米天线。在这里,我们提出了一种基于电子束光刻和聚焦氦离子束铣削的制造方法,进一步将二阶、一阶和零阶 Sierpiński 分形的二聚体纳米天线小型化。通过这种最先进的方法,实验上可以将它们的共振条件移动到亚微米波长范围,同时保持良好的图案定义,并实现亚 10nm 的间隙尺寸,以获得高近场增强。这些高度复杂的纳米结构通过暗场散射光谱进行数值模拟和分析,以监测分形结构对散射光谱和近场增强的影响。

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