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以氖气作为溅射气体通过反应磁控溅射制备的WO₃薄膜的电致变色特性

Electrochromic Properties of Reactive Magnetron Sputtered WO₃ Thin Films Prepared by Neon as Sputter Gas.

作者信息

Uday Kumar K, Subrahmanyam A

机构信息

Semiconductor Laboratory, Department of Physics, Indian Institute of Technology Madras, Chennai 600036, India.

出版信息

J Nanosci Nanotechnol. 2020 Jun 1;20(6):3724-3733. doi: 10.1166/jnn.2020.17519.

Abstract

Electrochromic phenomenon is an emerging technology for renewable energy applications. Several material oxides used for the electrochromic application, the tungsten oxide (WO₃) has shown good coloration efficiency (CE). Present manuscript, we are reporting the results of the coloration efficiency of DC magnetron sputtered WO₃ films for electrochromic applications (thicknesses 190 nm to 700 nm) with sputter gas neon at 300 K. Hydrogen and Lithium ions have been intercalated into WO₃ lattice for coloration. The CE value is increasing with increase of thickness of WO₃ thin films; CE for 700 nm thick films are: 87 cm²/C and 137 cm²/C for H and Li respectively. The coloration efficiency (CE) observed to be increasing with wavelength. The maximum efficiency of the hydrogen intercalated neon sputtered films achieved at 860 nm wavelength is about 129.9 cm²/C and for the lithium intercalatedWO₃ films the maximum efficiency achieved at 780 nm with 238.5 cm²/C. These neon sputtered WO₃ thin films show good stability of coloration efficiency even after 500 cycles of coloring and bleaching cycles. The work function of the colored and transparent states of WO₃ thin films are 4.513 eV and 4.755 eV respectively. Finally we have fabricated the electrochromic device (ECD) prepared with nafion thin film as an ion conducting layer and the ECD has shown a maximum coloration efficiency (CE) of 112.1 cm²/C.

摘要

电致变色现象是一种用于可再生能源应用的新兴技术。几种用于电致变色应用的材料氧化物中,氧化钨(WO₃)已显示出良好的着色效率(CE)。在本论文中,我们报告了在300 K下用溅射气体氖通过直流磁控溅射制备的用于电致变色应用的WO₃薄膜(厚度为190 nm至700 nm)的着色效率结果。氢离子和锂离子已插入WO₃晶格中以实现着色。CE值随着WO₃薄膜厚度的增加而增加;700 nm厚薄膜的CE值对于H和Li分别为87 cm²/C和137 cm²/C。观察到着色效率(CE)随波长增加。氖溅射的氢离子插入薄膜在860 nm波长处实现的最大效率约为129.9 cm²/C,而锂插入的WO₃薄膜在780 nm处实现的最大效率为238.5 cm²/C。这些氖溅射的WO₃薄膜即使在经过500次着色和漂白循环后仍显示出良好的着色效率稳定性。WO₃薄膜着色态和透明态的功函数分别为4.513 eV和4.755 eV。最后,我们制备了以全氟磺酸薄膜作为离子传导层的电致变色器件(ECD),该ECD显示出的最大着色效率(CE)为112.1 cm²/C。

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