Chen Dong, Qian Jiang, Liu Jia, Chen Baojie, An Guowen, Hong Yingping, Jia Pinggang, Xiong Jijun
Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
Micromachines (Basel). 2020 Mar 1;11(3):252. doi: 10.3390/mi11030252.
An in-line fiber optic Fabry-Perot (FP) sensor for high-temperature vibration measurement is proposed and experimentally demonstrated in this paper. We constructed an FP cavity and a mass on single-mode fibers (SMFs) by fusion, and together they were inserted into a hollow silica glass tube (HST) to form a vibration sensor. The radial dimension of the sensor was less than 500 μm. With its all-silica structure, the sensor has the prospect of measuring vibration in high-temperature environments. In our test, the sensor had a resonance frequency of 165 Hz. The voltage sensitivity of the sensor system was about 11.57 mV/g and the nonlinearity was about 2.06%. The sensor could work normally when the temperature was below 500 °C, and the drift of the phase offset point with temperature was 0.84 pm/°C.
本文提出并通过实验验证了一种用于高温振动测量的在线光纤法布里-珀罗(FP)传感器。我们通过熔接在单模光纤(SMF)上构建了一个FP腔和一个质量块,然后将它们一起插入一根空心石英玻璃管(HST)中,形成一个振动传感器。该传感器的径向尺寸小于500μm。由于其全石英结构,该传感器具有在高温环境下测量振动的前景。在我们的测试中,该传感器的共振频率为165Hz。传感器系统的电压灵敏度约为11.57mV/g,非线性度约为2.06%。当温度低于500°C时,该传感器能够正常工作,相位偏移点随温度的漂移为0.84pm/°C。